In article the design of an integrated micromechanical accelerometer of capacitive type is considered. The method with use of operation of self-assembly, constructed on the basis of the operated self-organization of mechanically intense semiconductor layers of GaAs/InAs is considered. This design was designed also a promodelirovana in ANSYS CAD. Results of model operation meet requirements, shown to present microaccelerometers, and give the chance to use them for further perfecting of structures of the given type. It is possible to use the obtained data in particular for calculation of the recommended parameters when developing techniques of projection of accelerometers and gyroscopes and also for development of more precise models of microelectromechanical structures.

Keywords: MEMS, capacitive type, micromechanical accelerometer, design, sensor, sensor, mathematical model, GaAs/InAs

In this paper a systematic study of individual single-walled and multi-walled carbon nanotubes was performed by Raman spectroscopy and high-resolution electron microscopy. We have presented the geometrical and electronic structure analysis on the examples of two tubes: individual single-walled and double-walled nanotubes. The role of different environmental effects and their influence on the final structure assignment are discussed. Moreover, we have shown that the Raman spectroscopy gives reliable estimations of the nanotube diameters and the conductivity. Given a non-destructible character of Raman spectroscopy, we may conclude that it is one of the most efficient methods for structure analysis of carbon nanotubes.

Keywords: Carbon nanotubes, Raman spectroscopy, electron microscopy