ZnO nanorod arrays have been synthesized on silicon wafers by chemical vapor deposition (CVD) technique with different temperature modes, without metal catalyst. With this method vertically aligned ZnO nanostructures were grown at the quite low temperatures. Modification of the method allowed to place silicon substrates in areas with different ratios of concentrations of the molecules in the vapor phase. Photoluminescence spectroscopy and electron microscopy studies have shown that morphologies and optical properties of nanorods depends on different ratios of concentrations of the molecules in the vapor phase.
Keywords: ZnO nanorods,chemical vapor deposition (CVD), photoluminescence