The method of calculating the effect of thermal stress on the dynamic characteristics of inertial microelectromechanical systems (MEMS) is presented in this article. Testing was conducted on a technique of vibrating gyroscope LL type electrostatic actuator in a temperature range from -40 to 80 ° C. It is shown that the thermoelastic stresses lead to a shift in the natural oscillation frequencies and the change of amplitude-frequency characteristics of the system. Method of calculation is based on the sequential solution of differential equations of heat conduction and the generalized Hooke's law, taking into account thermal stresses. Modal analysis and construction of MEMS amplitude-frequency characteristics is performed considering prestressed calculated in the previous step.
Keywords: microelectromechanical systems, micromechanical gyroscope, thermoelastic stresses, temperature errors, numerical simulation, frequency response
A model is presented for the calculation of thermoelastic stress and displacement in semiconductor structures
due to laser processing. Developed software based on the model allows to determine the optimal parameters of laser processing with taking into account the physical and topological parameters of the structure. The model is divided into two tasks: the non-stationary heat conduction equation is solved, and the equilibrium equations and Hooke's law. For equations solution was used the finite difference method.
Keywords: Laser processing, thermal stress, finite difference method
Results of research of influence of processing operations of Nd:YAG of the laser are presented in article, such as the speed of scanning and power of a laser beam on maximum temperature and the thermodeformed status in structure dye-sensitized solar cell. Dependences a component of a tensor of tension are received at various processing operations by means of numerical experiment. Results of researches showed that in intense the deformed status is depend on temperature gradient more, then on coefficients of linear expansion of structure which in this structure differ slightly.
Keywords: laser technologies, thermodeformed, numerical simulation